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  • Laser Inspection Tools

Inspection Tools

Inspection Tools and Instruments

National Laser offers the widest variety of replacement lasers for inspection equipment.

National Laser has been supplying lasers to semiconductor inspection equipment manufacturers since 1992. We often work closely with OEM customers to provide tailored alignment, optical, electronic and servicing solutions that meet customers' unique requirements. With manufacturing and distribution partners in Europe and Asia, we can offer complete global laser solutions to semiconductor inspection equipment companies worldwide.

Click on the Applications below for more information on Inspection Tool Laser Devices We Service:

Wafer Inspection

  • KLA-Tencor™ Surfscan® 6200 Inspection Tool
  • KLA-Tencor Surfscan 6220 Inspection Tool
  • KLA-Tencor Surfscan 6400 Inspection Tool
  • KLA-Tencor Surfscan 6420 Inspection Tool
  • KLA-Tencor™ Surfscan® 7600 Inspection Tool
  • KLA-Tencor™ Surfscan® 7700 Inspection Tool
  • KLA-Tencor™ Surfscan® AIT1 Inspection Tool
  • KLA-Tencor™ Surfscan® AIT II Inspection Tool
  • KLA-Tencor™ Surfscan® AIT III Inspection Tool
  • KLA-Tencor™ Surfscan® AIT XP Inspection Tool
  • KLA-Tencor™ Surfscan® SP1 DLS Inspection Tool

Ion Implant Monitoring

  • Therma-Wave™ 200 Monitoring Tool
  • Therma-Wave 240 Monitoring Tool
  • Therma-Wave 300 Monitoring Tool
  • Therma-Wave 400 Monitoring Tool
  • Therma-Wave 420 Monitoring Tool

Confocal Defect Review

  • KLA-Tencor CRS 500 (Ultrapoint) Defect Review Station
  • KLA-Tencor CRS 1010 (Ultrapoint) Defect Review Station

Mask Inspection

  • Horiba™ PR-PD2 Mask Inspection Tool/li>

Warranty Information

All repairs include an exceptional warranty.

Contact Us at 801-467-3391